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MEMSLib Reference Active Elements The following table provides the bidirectional rotary comb drive parameters, their values and descriptions. Description Layout Parameter Name Active angular comb length Default Value Schematic parameter name aclength 120 degrees active_comb_length Inner radius of rotor rri 50 µm rotor_inner_radius Inner radius of stator comb rsi 60 µm stator_inner_radius Outer radius of stator comb rso 150 µm stator_outer_radius Rotor spoke width rspokew 12 µm rotor_spoke_width Stator spoke width sspokew 15 µm stator_spoke_width Width of comb fingers fwidth 5 µm finger_width Airgap between adjacent comb fingers airgap 5 µm finger_gap Angular finger overlap afovlp 30 degrees finger_overlap 1 DIR Direction of combdrive S-Edit Symbol Name MEMS Pro User Guide S_RCOMBD_1_M_PHI_S and S_RCOMBD_1_M_PHI_B (for poly1 Contents Index 547
