Download User's Guide VacSimHigh Vacuum System - INTEC

Transcript
Table of Contents
Copyright ........................................................................... 2
Getting Technical Support ................................................. 2
INTRODUCTION ................................................ 7
Simulator Overview ........................................................... 7
How the Simulator Works .................................................. 8
INSTALLATION................................................ 10
System Requirements ..................................................... 10
Installation Procedure ....................................................... 11
Installing the Dongle and a Codeword .............................. 11
GETTING STARTED - .........................................
AN EXAMPLE PROBLEM ........................... 12
Overview ......................................................................... 12
Step-by-Step Procedure .................................................. 12
Where to go next ............................................................. 20
VACUUM SYSTEM DESIGN GUIDELINES .... 21
Purpose of Simulation ..................................................... 21
The Single Gas Model ..................................................... 21
Modelling Vacuum Components ...................................... 21
Modelling Vacuum History ............................................... 22
Control and Logic ............................................................ 22
Avoiding Convergence Problems .................................... 23
The Role of the Vacuum System Designer ...................... 24
Technical References ...................................................... 24
3