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23.
Creating scanning electron image files
The VB has a facility for scanning a rectangular area using the pattern generator
and recording the video level at each point in a file. This is useful for recording
images of resolution samples or marks. The detectors can be either the
backscattered or transmission detectors. As an example the following command
scans a 10 x 10 μm area:
VB_OPER>qimage
/size=(x=10,y=10)/skip=(x=4,y=4)/filt=8/points=8/frames=1/file=10um_are
a
The image can be viewed on screen by using a PVWave program:
VB_OPER>wave –r qimage_utility
This program reads the .img file, which is output by the pattern generator, and
allows the image to be written as a .tif or postcript file.
Part Number:878275
Vectorbeam Operator Manual