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Transcript
Power Up
Main Power
01-01
PDU
SysCon
VacCon
Servo
Computer
Laser Computer
Turbo pump
Rough pump
Power strips
HV Power Supply
Turbo
Pump
Controller
Ion Pump
(Dedicated outlet)
Figure 2. Power Cords and Power Strips, Rear of Electronics Module
1-5.
Switch off all circuit breakers in the PDU.
1-6.
Plug the VacCon, Servo, and SysCon module power cords and the Ion Pump power cord
into the power strips.
NOTE: The ion pump has its own dedicated outlet on the left power strip, as shown in Figure 2.
Part 2. If the Emergency Stop Switch is Pushed In:
If the emergency stop switch is pushed in, proceed as follows:
2-1.
Release the emergency switch from its detented position.
2-2.
Push the green ON button next to the EMO.
Revision B, 3/97
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