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Remove/Replace Ion Beam Column
05-09-10
5-2.
Place the column housing over the port on the workchamber in the correct orientation.
5-3.
Gently lower the column housing straight down into the port.
5-4.
Rotate the column housing as necessary for proper alignment of the bolt holes on the column housing and the process module.
5-5.
Replace the four mounting bolts in their original holes on the mounting flange.
5-6.
Check the O-ring and adjacent surfaces on the top of the column housing and the bottom
of the ion gun assembly for cleanliness.
5-7.
Position the column cap assembly over the column and gently place it on the column
housing. Rotate it as needed for proper alignment.
5-8.
Tighten the two alignment screws that were initially loosened.
5-9.
Making sure that the pin is centered, connect the circular connector to the Deflection
input.
5-10. Connect all high voltage cables and signal cables to the column (see Figure 8).
NOTICE: AVOID BENDING PINS
Be careful when reconnecting the 3-pin and 20-pin connectors. The pins
are easily bent.
5-11. Connect the vacuum bellows from the ion pump to the column.
5-12. Reattach the MCP connectors inside the chamber (see Figures 6 and 7).
5-13. Loosen the flood gun height positioning screw and slide the flood gun up until the lower
portion of the flood gun assembly contacts (is flush against) the lower column (see Figure
2). If necessary, loosen the lateral positioning screws and adjust the lateral position of the
flood gun to obtain a good fit against the lower column. Make sure that the flood gun is
aligned with (points directly at) the center bore of the MCP (see Figures 1, 2, 3, 4, and 5).
5-14. Tighten the height (and, if used, the lateral) positioning screw(s).
5-15. Close the workchamber and pump down the system (see Service Procedure 04-03).
5-16. Enable the high voltage power supplies.
5-17. Cure the column (see Service Procedure 05-12-10).
5-18. Heat the ion source (see Service Procedure 05-11).
5-19. Calibrate the deflection control system as described in Section 7 of this manual.
Revision B, 3/97
Page 13 of 14