Download Service Manual

05-12-25 COLUMN AND LENS CURING: 25 NM COLUMN
05-13 COLUMN ALIGNMENT
05-14 DRIFT TEST
05-15-05 APERTURE SHIELD REMOVAL, INSPECTION, & REPLACEMENT: 5 NM COLUMN
05-15-10 APERTURE SHIELD REMOVAL, INSPECTION, & REPLACEMENT: 10 NM COLUMN
05-15-25 APERTURE SHIELD REMOVAL, INSPECTION, & REPLACEMENT: 25 NM COLUMN
05-16-05 BLANKING APERTURE REPLACEMENT: 5 NM COLUMN
05-16-10 BLANKING APERTURE REPLACEMENT: 10 NM COLUMN
05-16-25 BLANKING APERTURE REPLACEMENT: 25 NM COLUMN
LOADLOCK, WORKCHAMBER
06-01 SAMPLE HOLDER INSPECTION AND CLEANING
06-02 LOADLOCK INSPECTION AND CLEANING
06-03 WORKCHAMBER INSPECTION AND CLEANING
06-04 TRANSPORT CARRIAGE INSPECTION AND ALIGNMENT
06-05 PROCESS MODULE EXTERNAL CLEANING
DEFLECTION SYSTEM
07-02 SCAN ROTATION CALIBRATION
07-03 SCAN GAIN CALIBRATION
07-04 PAN GAIN CALIBRATION
07-05 PAN ROTATION/ORTHO CALIBRATION
07-06 CHECK THE CENTER OF ROTATION
07-07 MUX SHIFT CALIBRATION
07-08 REFERENCE CURVE CALIBRATION AND DATABASE UPDATE
FLUIDS REGULATION
08-01 FLUIDS REGULATOR PRESSURE CHECK
08-02 VIBRATION ISOLATOR BALANCE ADJUSTMENT
COMPUTER, SOFTWARE
09-01 ARCHIVING/RESTORING FILES USING ARCTOOL
09-02 SETTING TIME AND DATE ON IBM RS6000 COMPUTERS
09-03 USING THE VACSERVER PROGRAM
09-04 USING THE MICRION CONSTANTS EDITOR
09-05 UPGRADING TO RS6000 COMPUTER
09-06 CONFIGURING AIX FOR A NETWORK PRINTER
DEPOSITION SYSTEM
10-01 LUBRICATING THE DUAL NOZZLE LEAD SCREWS
10-02 DUAL NOZZLE REPLACEMENT & COARSE ALIGNMENT
10-03 DUAL NOZZLE FINE ALIGNMENT
10-04 FUNNEL REPLACEMENT
10-05 FUNNEL ALIGNMENT
10-06 VERIFYING DEPO LIMIT SWITCH SETTINGS
10-07 MAKING HEATER AND COOLER BOARD SETTINGS
GAS CYLINDER REPLACEMENT
11-01 CHLORINE CYLINDER REPLACEMENT
11-02 XENON DIFLUORIDE CYLINDER REPLACEMENT
11-03 BROMINE (BR2) CYLINDER REPLACEMENT
11-04 CARBON CYLINDER REPLACEMENT
Page iv of vi
Revision B, 3/97